ChemSource™ 150
Project Description
Ceres ChemSource 150 is a high-purity chemical delivery system designed specifically for use in CVD applications. ChemSource 150 is a fully-automated, single-vessel, pressure dispense system. Capable of housing vessels up to 38 liters, the ChemSource 150 can deliver CVD chemicals to as many as 3 separate points-of-use.
Standard Functions
- Online – Actively delivering chemical
- Ready – Waiting for “call for chemical”
- Offline – Not available for “call for chemical”
- Automated vessel change-out procedure with user prompts
- Pump/Purge to Point-of-Use