Saugerties, NY

ChemSource™ 150

Project Description

Ceres ChemSource 150 is a high-purity chemical delivery system designed specifically for use in CVD applications. ChemSource 150 is a fully-automated, single-vessel, pressure dispense system. Capable of housing vessels up to 38 liters, the ChemSource 150 can deliver CVD chemicals to as many as 3 separate points-of-use.

Standard Functions
  • Online – Actively delivering chemical
  • Ready – Waiting for “call for chemical”
  • Offline – Not available for “call for chemical”
  • Automated vessel change-out procedure with user prompts
  • Pump/Purge to Point-of-Use

Project Details